MultiFields — Piezoelectric Motion Stage·Room Temperature / Carrier·7550xy

Intro.      Spec.       DL.    CN

Piezoelectric Stage · Closed-loop Carrier.Lxxxx.XY

➡ Customized Solution For “Large-range, High-precision, High-load” Requirements Of The Loading Platform

• Large Range In XY Direction 100 mm × 100 mm

• Minimum Step Size 20 nm

• Maximum Speed 20 mm/s

•Closed-loop Sensing Resolution 1 nm (other option see Datasheet)

• Ensure Through-hole During Full Range Movement 85 mm × 65 mm

• Supports Non-magnetic (.NM), High-vaccum (.HV) And Ultra-high Vacuum (.UHV)

• Main Aluminum Alloy (Hard Oxidized)

Carrier.L7550.XY

Carrier.1010.XY

Basic Information

Active Axes

X，Y

Size

250 mm × 200 mm × 30 mm

250 mm × 200 mm × 40 mm

Max Installation Space

325 mm × 250 mm

350 mm × 350 mm

Through Hole ( Effective )

85 mm × 65 mm

120 mm × 120 mm

Upgrade Options

Expansion Options: NM, Non-magnetic Version; HV, High-vacuum Version; UHV, Ultra-high Vacuum Version

Materials

Aluminum Alloy

Cable Length

HV, Standard Shielded Cable D-Sub-15; UHV, Kapton Enameled Wire PEEK-2mm pin

Operating Temperature Range

10 – 40 °C

Weight

2333 g

Motion Parameters – Space Recommended Installation Form I. (The following properties were measured under the recommended installation form)

Travel Range

75 mm × 50 mm

100 mm × 100 mm

Max. Speed

~ 15 mm/s

~ 10 mm/s

Step Size

～ 5 nm

Maximum Step Frequency

Max. 20 kHz (Ultra-quiet Motion)

Load Capacitance

2 kg

4 kg

Pitch & Yaw (Full Range)

0.8 mrad（0.46°）

Sensor

Sensor Type

Grating Ruler Sensor

Sensor Range

75 mm × 50 mm

100 mm × 100 mm

Sensor Resolution

Grating Ruler Sensor 2 nm (other option see Datasheet)

Drawings