Carrier-EN

Through-hole · Scanner [Closed-loop]

Carrier.S Series，Standard

XY & XYZ Motion，Parallel Motion Configuration

Capacitance (.C) Position Sensor; Maximum Resolution 0.2 nm; Ultra-high Vacuum (.UHV) Option Upgrade

XY , 2-Dimensional Motion XYZ，3-Dimensional Motion

Carrier.S200.xy.C；Carrier.S200.xyz.C

XY，XYZ Motion，Long Range & Fast Response

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Size · 182 mm × 150 mm × 15 mm

Travel Range · 200 um x 200 um

Travel Range · 200 um x 200 um x 200 um

Through-hole · Scanner [Closed-loop]

Carrier.HS Series，High-load

XY & XYZ Motion，Parallel · Horizontal Motion Configuration

Capacitance (.C) Position Sensor; Maximum Resolution 0.2 nm; Ultra-high Vacuum (.UHV) Option Upgrade

XY , 2-Dimensional Motion

XYRz，3-Dimensional Motion

Carrier.HS100.xy.C

High Load XY Direction Motion, Ensure Linear Motion In Plane

Size · 150 mm × 150 mm × 30 mm

Travel Range · 100 um

Carrier.HS100.xyRz.C

High Load XY Direction Movement, Increase RZ automatic Degree Adjustment

Size · 150 mm × 150 mm × 30 mm

Travel Range · 100 um x 100 um x 1 mrad

Through-hole · Scanner [Closed-loop]

Carrier.HS Series，High-load

Z & ZTxTy Motion，Parallel · Vertical Motion Configuration

Capacitance (.C) Position Sensor; Maximum Resolution 0.2 nm; Ultra-high Vacuum (.UHV) Option Upgrade

Z , 1-Dimensional Motion

ZTxTy , 3-Dimensional Motion

Carrier.HS100.z.C

High-load Z-Motion, High Collimation Design

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Size · 150 mm × 150 mm × 150 mm

Travel Range · 100 um

Carrier.HS100.zTxTy.C

High-load Z-axis Movement, Increase TxTy Degrees Of Freedom Adjustment

Size · 150 mm × 150 mm × 30 mm

Travel Range · 100 um x 1 mrad x 1 mrad