MultiFields — Piezoelectric Motion Stage·Room Temperature / Lxxx.indus
.indus Series—Motion Module For Minimalist Industrial Style
Multi Degree Of Freedom · Nanoscale Motion Can Also Be Built On Building Blocks
Optional Version ⇨
L030.indus
L060.indus
L100.indus
L180.indus
.NM, Absolute Non-magnetic Version;
.HV, High-vacuum Version;
.UHV, Ultra-high Vacuum Version;
Size
63 mm x 24 mm x 14 mm
105 mm x 24 mm x 16 mm
180 mm x 24 mm x 17 mm
300 mm x 36 mm x 18 mm
Main Material
Stainless Steel / Aluminum Alloy
Cables & Connectors
Standard Shielded Cable D-Sub 15
Motion Parameters – Space Recommended Installation Form I. (The following properties were measured under the recommended installation form)
Travel Range
30 mm
60 mm
100 mm
180 mm
Max. Speed
~ 20 mm/s
Step Size
~ 10 nm
Step Frequency
Max. 20 kHz (Ultra-quiet Motion)
Dynamic Force
3 N
Holding Force
5 N
Pitch / Yaw Over Travel Range
0.3 mrad
Motion Parameters – Space Recommended Installation Form II. (The following properties were measured under the recommended installation form)
Max. Load
2 N
Holding Force
5 N
Sensor
Encoder Type
Grating Ruler Sensor
Encoder Range
30 mm
60 mm
100 mm
180 mm
Encoder Resolution
Grating Ruler Sensor 2 nm (other option see Datasheet)