S300.x.C-EN

Piezoelectricity · Single Dimensional Scanning Motion S300.x.C

➡ Standard Single-axis Scanning Motion Module, Supporting Closed-loop Control Of Capacitance

S300.x.C

• X-direction Travel Range 300 um;

• Size, 50 mm x 50 mm x 17 mm;

• Closed-loop Resolution Better Than 3 nm (Open-loop Version Available);

• Maximum Load 500 g;

• Supports Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Options;

Optional Version ⇨

S300.x.C

Basic Information

Motion Direction

X Direction

Upgrade Options

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Size

50 mm × 50 mm × 17 mm

Main Material

Aluminum Alloy & Stainless Steel

Travel Range

300 um(Open-loop)  250 um(Closed-loop)

Motion & Position

Motion Resolution (Close-loop)

3 nm

Linear Error

0.1%

Resonance Frequency

350 Hz

Max. Load

500 g

Encoder Type

Capacitive Type

Max Operating Voltage

Max.150 V

Other Information

Recommended Operation Temperature

-20 ~ 80 °C

Weight

200 g

Cable Length

1m / D-Sub 3W3

Drawings