SH30.xyz.C-EN

Piezoelectricity · 3-Dimensional Scanning Motion SH30.xyz.C

➡ Customized Solutions For “3 Degree Of Freedom Scanning Motion” Requirements Such As Precision Optics And Semiconductor Characterization

SH30.xyz.C

• 3D XYZ Travel Range 30 um x 30 um x 15 um;

• Size, 160 mm x 160 mm x 35 mm;

• Closed-loop Resolution Better Than 0.3 nm;

• Maximum Load 10 kg;

• Supports Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Options;

Optional Version ⇨

SH30.xyz.C

Basic Information

Motion Direction

X, Y, Z Direciton

Size

160 mm × 160 mm × 35 mm

Main Material

Stainless Steel

Travel Range

30 um × 30 um × 15 um

Upgrade Options

Optional Extensions: HV, High-vaccum; UHV, Ultra-high Vacuum Version

Motion & Position

Motion Resolution

0.1 nm(Closed-loop) 0.3 nm(Closed-loop)

Repeatability

< 3 nm

Yaw Angle

20 urad / 20 urad / 50 urad

Resonance Frequency (No-load)

500 Hz

Max. Load

10 kg

Encoder Type

Capacitive Type

Max Operating Voltage

150 V

Other Information

Recommended Operation Temperature

-20 ~ 80 °C

Weight

3 kg

Cable Length

1 m / D-sub 3W3

Drawings