Motion · Closed-loop · Lab Series

Linear · Closed-loop
LSxx.Lab.X

• Two External Dimensions To Choose From: 35 mm & 65 mm

• Built-in Integrated Optical Position Sensor

• Support For Non-magnetic (.NM), High-vacuum (.HV) and Ultra-high Vacuum (.UHV) Option Upgrades

• Controller Compatible With Rotator, Goniometer

Rotator · Closed-loop
RSxx.Lab.X

• Two External Dimensions To Choose From: 35 mm & 65 mm

• Built-in Integrated Optical Position Sensor

• Support For Non-magnetic (.NM), High-vacuum (.HV) and Ultra-high Vacuum (.UHV) Option Upgrades

• Controller Compatible With Linear, Goniometer

Goniometer · Closed-loop
GS65.Lab.X

• Two External Dimensions To Choose From: 35 mm & 65 mm

• Built-in Integrated Optical Position Sensor

• Support For Non-magnetic (.NM), High-vacuum (.HV) and Ultra-high Vacuum (.UHV) Option Upgrades

• Controller Compatible With Linear, Rotator

Motion Stage · Closed-loop · Indus Series

Linear · Closed-loop
Lxxx.Indus

• 30, 60, 100, 120, 150 & 180 mm Travel Range Are Optional

• Built-in Integrated Optical Position Sensor, 2 nm Resolution

• High Load, Support For Multiple Splicing Cases

• Supports Ultra-high Vacuum (.UHV) Option Upgrades

• Controller Compatible With Lab Series Linear, Rotator & Goniometer

Scanner · Closed-loop

Compact · Scanner (Closed-loop)
S , SD & SH Series

• Extremely Compact Exterior Design; X, Z, XY & XYZ Motion Directions Are Covered

• The Motion Range Covers 100 um To 300 um (Larger Range Can Be Customized)

Brand New Design Guarantees High Operating Frequency And Extremely Fast Response

Capacitance (.C) Position Sensor

Resolution Up To 0.2 nm

Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades

Objective Lens · Scanner (Closed-loop)
Carrier.OB.Series

Z-axis Single Direction Motion, With Range Cover 50, 100 & 400 um

Fast & Stable Motion, Completed Within 10 ms

Support High-load Objective Lens Options; Provide Multiple Objective Lens Adapters

• Support Third-party Software And Hardware Control To Achieve Automatic Focusing

Capacitance (.C) Position Sensor

Resolution Up To 0.2 nm

Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades

Thtrough-hole · Scanner (Closed-loop)
Carrier.S & HS Series

Motion Mode Covers Linear Motion And Pitch Motion

• Comprehensive Support For Sports Forms: X, Z, XY, XYZ & ZTT

The Motion Range Covers 100um To 300um (Larger Range Can Be Customized)

Capacitance (.C) Position Sensor

Resolution Up To 0.2 nm

Ultra-fast Motion Response & Long-term Fatigue Test

Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades

Load Stage · Closed-loop · Carrier Series

Load Stage · Motion (Closed-loop)
Carrier.L7550.XY

• Linear Travle Range Covers 75 mm × 50 mm

• Built-in Integrated Optical Position Sensor, 2 nm Resolution

• Maximum Load 2.5 kg

• Support Standard Microscope Stage Installation Connection

• Support For Non-magnetic (.NM) And Ultra-high Vacuum (.UHV) Option Upgrades

Load Stage · Rotation (Closed-loop)
Carrier.R200

• 360 Degree Continuous Rotation

• Built-in Integrated Optical Position Sensor, 1 μrad Resolution

• Maximum Load 2 kg

• Support Standard Microscope Stage Installation Connection

• Support For Ultra-high Vacuum (.UHV) Option Upgrades