MultiFields — Piezoelectric Motion Stage·Room Temperature / Carrier/ Carrier.HS100.xyRz.C

Intro.      Spec.       DL.    CN

Piezoelectric Stage · High-load Through-hole Carrier.HS100.xyRz.C

➡ High-load · high-speed XY Plane Motion, Z-axis Rotation Design, Ensuring Alignment Movement In The XY Plane

Carrier.HS100.xyRz.C

• 2-dimensional XY Scan Motion 100 um, Z-axis Rotation 1 mrad;

• Closed-loop Resolution Better Than 1 nm;

• Maximum Load 5 kg;

• For Optical Microscopy – Super-resolution Customized Solution;

• Support For Non-magnetic (.NM) And High-vacuum (.UHV) Option Upgrades;

Optional Version ⇨

Carrier.HS100.xyRz.C

Basic Information

Motion Direction

X, Y, Direction + Rz Rotation

Size

150 mm × 150 mm × 30 mm

Main Material

Aluminum Alloy / Stainless Steel

Travel Range

100 um × 100 um Rz: 1 mrad

Upgrade Options

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Motion & Position

Linearity Error (Z-axis Motion)

0.035%

Motion Resolution (Open-loop/Closed-loop)

1 nm / 0.2 nm

Repeatability

10 nm

Rigidity

2 N/ um

Resonance Frequency (No-load/2.5 kg)

420 Hz/ 130 Hz

Max. Load

5 kg

Encoder Type

Capacitive Type

Max Operating Voltage

Max. 150 V

Other Information

Recommended Operation Temperature

15 ~ 40 °C

Weight

1 kg

Install

Threaded Hole Automatically Compatible With Carrier.L7550.XY

Drawings