Carrier.HS100.xy.C-EN

Scanning Motion · High-load Through-Hole Carrier.HS100.xy.C

➡ High-load · High-speed XY Plane Motion，Large Through-hole Design，Parallel Design + Capacitance Closed-loop Sensor

Carrier.HS100.xy.Ｃ

• 2-dimensional XY Scan Motion 100 um；

• Closed-loop Resolution Better Than 1 nm;

• Maximum Load 5 kg;

• For Optical Microscopy – Super-resolution Customized Solution;

• Support For Non-magnetic (.NM) And High-vacuum (.UHV) Option Upgrades;

Optional Version ⇨

Carrrier.-HS100.xy.C

Basic Information

Motion Direction

X, Y, Direction

Size

150 mm × 150 mm × 40 mm

Main Material

Aluminum Alloy / Stainless Steel

Travel Range

100 um × 100 um

Upgrade Options

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Hollow Through Hole

66 mm × 66 mm

Motion & Position

Linearty Error（Z-axis Motion）

0.035%

Motion Resolution

1nm / 0.2nm

Repeatability

± 10 nm

Rigidity

2 N/ um

Resonance Frequency (No-load/2.5 kg)

420 Hz/ 130 Hz

Max. Load

5 kg

Encoder Type

Capacitive Type

Max Operating Voltage

150 V

Other Information

Recommended Operation Temperature

15 ~ 40 °C

Weight

1 kg

Drawings