MultiFields — Piezoelectric Motion Stage·Room Temperature / Carrier/ Carrier.HS100.z.C

Intro.      Spec.       DL.    CN

Scanning Motion · High-load Through-Hole Carrier.HS100.z.C

➡ High-load · High-speed Z-axis Motion，Large Through-hole Design，Parallel Design + Capacitance Closed-loop Sensor

Carrier.HS100.z.C

• Z Scan Motion 100 um;

• Closed-loop Resolution Better Than 1 nm;

• Maximum Load 5 kg;

• For Optical Microscopy – Super-resolution Customized Solution;

• Support For Non-magnetic (.NM) And High-vacuum (.UHV) Option Upgrades;

Optional Version ⇨

Carrier.HS100.z.C

Basic Information

Motion Direction

Z Direction

Size

150 mm × 150 mm × 30 mm

Main Material

Aluminum Alloy / Stainless Steel

Travel Range

100 um

Upgrade Options

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Hollow Through Hole

66 mm × 66 mm

Motion & Position

Linearity Error（Z-axis Motion）

0.035%

Pitch/Yaw/Rotation

50 urad / 50 urad / 10 urad

Motion Resolution (Open-loop/Closed-loop)

1 nm / 0.3 nm

Repeatability

± 10 nm

Rigidity

2.5 N/ um

Resonance Frequency (No-load/2.5 kg)

500 Hz/ 200 Hz

Max. Load

5 kg

Encoder Type

Capacitive Type

Max Operating Voltage

Max. 150 V

Other Information

Recommended Operation Temperature

15 ~ 40 °C

Weight

1 kg

Drawings