MultiFields — Piezoelectric Motion Stage·Room Temperature / Carrier / Carrier.HS100.zTxTy.C

Intro.      Spec.       DL.    CN

High-load through-hole · Scanning Motion Carrier.HS100.zTxTy.C

➡ For Z-direction Scanning Motion, Two Axis Swing Adjustment Ensures True Alignment

Carrier.HS100.zTxTy.C

• 3-dimension Z, θxy Scanning Motion;

• 100 um Travel Range, 1 mrad & 1 mrad；

• Closed-loop Resolution Better Than 1 nm;

• For Optical Microscopy – Super-resolution Customized Solution;

• Maximum Load 5 kg;

• Support For Non-magnetic (.NM) And High-vacuum (.UHV) Option Upgrades;

Optional Version ⇨

Carrier.HS100.zTxTy.C

Basic Information

Motion Direction

Z，θx & θy

Size

150 mm × 150 mm × 30 mm

Main Material

Aluminum Alloy / Stainless Steel

Travel Range (Z，θx & θy)

100 um，1 mrad & 1mrad

Upgrade Options

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Hollow Through Hole

66 mm × 66 mm

Motion & Position

Z Linearity Error

0.035%

θ Linearity Error

0.15%

Z Motion Resolution (Open-loop/Closed-loop)

1 nm / 0.5 nm

ΘMotion Resolution (Open-loop/Closed-loop)

0.05 urad / 0.04 urad

Repeatability (Z, θ)

±10 nm, ±0.1 urad

Rigidity

2 N/ um

Z Resonance Frequency (No-load/2.5 kg)

480 Hz/ 160 Hz

Θ Resonance Frequency (No-load/2.5 kg)

500 Hz/ 150 Hz

Max. Load

5 kg

Encoder Type

Capacitive Type

Max Operating Voltage

Max. 150 V

Other Information

Recommended Operation Temperature

15 ~ 40 °C

Weight

1 kg

Install

Threaded Hole Automatically Compatible With Carrier.L7550.XY

Drawings