MultiFields — Piezoelectric Motion Stage·Room Temperature / Carrier / Carrier·S200·XY/XYZ

Intro.      Spec.       DL.    CN

Piezoelectric Stage · High-load Carrier.S200.XY / XYZ

➡ Customized Solution For “Large-range, High-precision, High-load” Requirements Of The Loading Platform

• 2-dimensional XY Scan Motion 200 um × 200 um；

• 3-dimensional XYZ Scan Motion 200 um × 200 um × 200 um；

• Closed-loop Resolution Better Than 1 nm;

• Maximum Load 500 g

• For Optical Microscopy – Super-resolution Customized Solution;

• Support For Non-magnetic (. NM) And High-vacuum (. UHV) Option Upgrades;

Carrier·S200·XY / XYZ

Notes

Basic Information

Motion Direction

Carrier.S200.XYZ: X, Y, Direction

Carrier.S200.XYZ: X, Y, Z Direction

Size

182 mm × 150 mm × 15 mm

Main Material

Aluminum Alloy / Stainless Steel

Travel Range

Carrier.S200.XY: 200 um × 200 um

Carrier.S200.XYZ: 200 um × 200 um × 200 um

Upgrade Options

Optional Extensions: Nm, Absolutely Non-magnetic Version; UHV, Ultra-high Vacuum Version

Hollow Through Hole

77 mm × 65 mm

Motion & Position

Motion Resolution

2 nm

Repeatability

± 20 nm

Linear Error

Better Than 0.1%

Resonance Frequency

200Hz(X) 150Hz(Y)

Max. Load

500 g

Encoder Type

Capacitive Type

Max Operating Voltage

Max. 150 V

Other Information

Recommended Operation Temperature

-15 ~ 40 °C

Weight

1kg

Install

Threaded Hole Automatically Compatible With Carrier.L7550.XY

Drawings